Keep this fact.
By linear algebra, we can know that $M'_{1} \times M=M'_{2}$.
Let $\beta _i$ be a row of $M'_{1}$ which is correspond to $M'_2$ 's $[0,0,...,0]$$[0,\ldots,0]$ row
and let $\beta_i=[\beta_{0,i},\beta_{1,i},...,\beta_{2^n-1,i}]$$\beta_i=[\beta_{0,i},\beta_{1,i},\ldots,\beta_{2^n-1,i}]$
Then we can know that $\beta_{i} \times M=[0,0,...,0] $$\beta_{i} \times M=[0,\ldots,0] $ by above fact.
So, if we define $b_i(x)=\beta_{0,i}x^0 \oplus \beta_{1,i}x^1 \oplus \cdot\cdot\cdot \oplus \beta_{2^n-1,i}x^{2^n-1}$.
Then, $$b_i(x)\oplus b_i(S(x))=\bigoplus_{u\in\mathbb{F}_2^n}\beta_{u,i}(x^u \oplus S(x)^u) $$
$$=\bigoplus_{u\in\mathbb{F}_2^n} \beta_{u,i}(\bigoplus_{v\in\mathbb{F}_2^n} \lambda_{u,v}x^v )$$
$$=\bigoplus_{u\in\mathbb{F}_2^n}(\bigoplus_{v\in\mathbb{F}_2^n}\beta_{u,i}\lambda_{u,v})x^v $$
$$=0$$\begin{align} b_i(x)\oplus b_i(S(x))= & \bigoplus_{u\in\mathbb{F}_2^n}\beta_{u,i}\big(x^u \oplus S(x)^u\big)\\ = & \bigoplus_{u\in\mathbb{F}_2^n} \beta_{u,i}\big(\bigoplus_{v\in\mathbb{F}_2^n} \lambda_{u,v}x^v \big)\\ = & \bigoplus_{u\in\mathbb{F}_2^n}\big(\bigoplus_{v\in\mathbb{F}_2^n}\beta_{u,i}\lambda_{u,v}\big)x^v\\ =& 0 \end{align}
We can apply this formula similarysimilarly to the case of $[1,0,...,0]$$[1,0,\ldots,0]$.